SDE系列

Apply screw type rotor with higher performance against by-product. High corrosion resistance from structural materials and temperature control.

Harsh Process Application Example

Lineup by Pumping Speed
**值泵送速度[升/分钟]

规格。/产品		SDE90X	SDE120TX	SDE200	SDE303X	SDE603X	SDE1203TX	SDE20N12TX	SDE30N20	SDE60N20
*值抽速 [升/分钟]1		1,300	1,500	3,300	5,000	10,000	20,000	30,000	50,000	100,000
极限压强 [啪]*1		1.3			0.5
电源电压 (50/60赫兹)		三相交流200 ~ 220伏，380 ~ 480伏
功耗[kW]*2		1.3	2.8	2.7	1.5	1.6	3.2	3.3		3.7
尺寸[毫米]*3	L	690		930	900			1000	1000	1080
	W	370		400	400			450	450	515
	H	501		500	905			1000	950	950

*1)不带N2清洗。*2)大约。极限压力下的值。*3)包装尺寸。
*联系我们了解国际标准合规性。规格。产品名称如有变更，恕不另行通知。*关于适用的气体，请联系我们。

S-P Curve
* S-P曲线因组合而异。

Dry Pump temperature selection for each process. Select booster pump / pipe heating specification. Supplemental choice of foreline & exhaust-line against by-product. Operational status can be monitored by Centralized Monitoring System (CMS). The total exhaust system of which equipped with abatement(heater, plasma, or combustion model).

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真空泵

SDE系列

苛刻过程应用示例

Max的阵容。抽速

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S-P曲线

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